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Hayley as a girls' name came first here & charted in the 1970s, but I worked with one who'd be 60 now, and Hayley Mills, who started the trend of using it on girls, was born in 1946.
The Hayley spelling looks more feminine to me because I'm used to it being a female first name - I've never seen the others irl, except as surnames. It's a bit dated here though, and nms.